ASM INTERNATIONAL N.V. LAUNCHES SONORA® VERTICAL FURNACE SYSTEM
12 Luglio 2022 - 5:45PM
ASM INTERNATIONAL N.V. LAUNCHES SONORA® VERTICAL FURNACE SYSTEM
Almere, The NetherlandsJuly 12, 2022, 5.45 p.m.
CET
New system addresses 300mm advanced
logic/foundry and memory applications with highest productivity and
lowest cost of ownership in its class
San Francisco, USA – ASM International N.V.
(Euronext Amsterdam: ASM) today introduced the SONORA® vertical
furnace system with dual reactor chambers for 300mm wafers. The
system’s dual boat reactors produce the highest available
throughput in its class, increasing reactor utilization to
virtually 100%, while ensuring the lowest capex.
“The introduction of the novel SONORA® system is
part of our strategy to selectively grow our vertical furnace
presence in the market. The new SONORA® ensures that ASM will be
strengthening its offering in advanced logic/foundry and memory
applications as well as extend our leadership position in the
market for More than Moore (such as analog and power)
applications,” said Hichem M’Saad, Chief Technology Officer and
Member of the Management Board.
The new SONORA® is fully compatible with the
original A412™, so existing process recipes are easily transferred,
accelerating system qualification and ramp up. System deliveries
have begun to multiple customers globally, among them leaders in
advanced logic, and power device manufacturing.
ASM’s predecessor A412™ vertical furnace system
has a proven track record of more than 1,000 reactors shipped to
customers worldwide and over 22 years of maturity in semiconductor
manufacturing. The new SONORA® has a novel system architecture that
maximizes floor space productivity as well as service area. Its
dedicated process modules have individually controlled high purity
mini environments. Our innovative gas injection system for low
pressure processing provides the best uniformities of deposited
films between the individual wafers at larger load sizes. These
larger process wafer load sizes combined with the updated control
system, new robots, faster wafer cooldown, faster boat exchange
modules generate up to 30% more productivity, compared to its
predecessor. Higher productivity also results in lower energy and
chemical usage per wafer. Special attention was given to the design
for serviceability leading to a spacious access for all maintenance
activities. The new system has been further modernized with an
intuitive graphical user interface, predictive maintenance by
advanced control diagnostics, and plug & play installation.
Customers can count on the SONORA® delivering increased reliability
and better ease of use with production output that achieves better
repeatability, productivity, and time utilization.
Like its predecessor, the SONORA® offers a
comprehensive portfolio of process applications including low
pressure chemical vapor deposition (LPCVD) processes like doped
silicon and silicon nitride films, diffusion processes such as wet
oxidation and anneal processes, as well as a leading portfolio of
atomic layer deposition (ALD) materials.
About ASM International
ASM International N.V., headquartered in Almere,
the Netherlands, and its subsidiaries design and manufacture
equipment and process solutions to produce semiconductor devices
for wafer processing, and have facilities in the United States,
Europe, and Asia. ASM International's common stock trades on the
Euronext Amsterdam Stock Exchange (symbol: ASM). For more
information, visit ASMI's website at www.asm.com.
Cautionary Note Regarding Forward-Looking
Statements: All matters discussed in this press release, except for
any historical data, are forward-looking statements.
Forward-looking statements involve risks and uncertainties that
could cause actual results to differ materially from those in the
forward-looking statements. These include, but are not limited to,
economic conditions and trends in the semiconductor industry
generally and the timing of the industry cycles specifically,
currency fluctuations, corporate transactions, financing and
liquidity matters, the success of restructurings, the timing of
significant orders, market acceptance of new products, competitive
factors, litigation involving intellectual property, shareholders
or other issues, commercial and economic disruption due to natural
disasters, terrorist activity, armed conflict or political
instability, changes in import/export regulations, epidemics and
other risks indicated in the Company's reports and financial
statements. The Company assumes no obligation nor intends to update
or revise any forward-looking statements to reflect future
developments or circumstances.
This press release contains inside information
within the meaning of Article 7(1) of the EU Market Abuse
Regulation.
CONTACT
Investor and media contact:Victor BareñoT: +31 88 100
8500 E: investor.relations@asm.com
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