Novellus Systems Launches SOLA(R) xT UVTP System For Sub-45nm High Volume Manufacturing
13 Gennaio 2010 - 10:05PM
PR Newswire (US)
Flexible Multistation Sequential Processing (MSSP) Architecture
Delivers ULK Films With 25 Percent Hardness Improvement over
Competitive Approach SAN JOSE, Calif., Jan. 13
/PRNewswire-FirstCall/ -- Novellus Systems (NASDAQ:NVLS) today
introduced its next-generation ultra-violet thermal processing
(UVTP) system, the SOLA xT. The SOLA xT is used in the
manufacturing of advanced logic devices at 45nm and below and
incorporates a proprietary UVTP treatment process that modifies the
physical characteristics of a previously-deposited film through
exposure to ultraviolet light and heat. The new system, featuring
on-board UV monitoring and a customizable optics assembly, provides
process flexibility and extendibility over multiple device
generations. The first SOLA xT system will be shipped to UMC's Fab
12i in Singapore. (Logo:
http://www.newscom.com/cgi-bin/prnh/20091020/SF95832LOGO) The
multi-station sequential processing (MSSP) architecture of SOLA
allows independent control of temperature, wavelength and intensity
at each station to deliver best-in-class uniformity and
productivity. This high degree of process configurability results
in UV treated ultra low-k (ULK) films with a 25 percent greater
hardness compared to single wavelength, single temperature curing
solutions. For example, UVTP is used to remove porogen and improve
the mechanical strength of ULK dielectric films used as inter-metal
layers. This treatment facilitates device integration and prepares
the films to withstand subsequent semiconductor processing steps
like packaging and chemical mechanical planarization (CMP). Other
advanced manufacturing integration schemes use spin-on dielectrics,
which sometimes incur damage during etching, wet cleaning or
photoresist ashing steps. In this instance, UVTP can be used to
repair this damage through chemical bond reconstruction. In the
front-end-of-the-line, UVTP may also be employed to induce strain
in the transistor channel of N-type Metal Oxide Semiconductor
(NMOS) devices. Strain is induced by depositing a high tensile
stress dielectric film, and subsequently exposing it to UV,
resulting in an increase of device performance. For all of the
applications cited above, monitoring equipment health and
delivering uniform wafer performance is necessary to improve
production efficiencies in a high volume manufacturing environment.
To achieve this goal, the new SOLA xT platform features on-board UV
monitoring and advanced algorithms to maintain stable
wafer-to-wafer performance. Best-in-class within-wafer uniformity
results are achieved with SOLA xT's customizable optics assembly,
where the UV lamps and reflectors can be oriented differently at
each of the four treatment stations. The MSSP architecture ensures
that each wafer is processed through a single wafer path, resulting
in one statistical distribution of data compared to competitive
solutions with up to four or six different wafer paths, and hence
as many different statistical distributions. "The new SOLA xT is
designed to meet the market needs for a robust UVTP system suitable
for high volume manufacturing at 32 nm," said Kevin Jennings,
senior vice president of the PECVD business unit at Novellus
Systems. "The independent control of temperature, UV wavelength,
and UV intensity enable SOLA xT to extend to future technology
generations, where new materials are likely to be introduced." For
more information about Novellus' UVTP technology, visit
http://www.novellustechnews.com/ About Novellus' SOLA UVTP
Technology: Novellus' SOLA ultraviolet thermal processing system
(UVTP) is used for the post-deposition treatment of low dielectric
constant films to improve mechanical and electrical properties. It
is also used in the front end of the line, to improve the stress of
high tensile nitride films used to enhance NMOS device performance.
The multi-station sequential processing architecture of the SOLA
platform results in high system throughput and excellent wafer
non-uniformity and wafer-to-wafer repeatability. About Novellus:
Novellus Systems, Inc. (NASDAQ:NVLS) is a leading provider of
advanced process equipment for the global semiconductor industry.
An S&P 500 company, Novellus is headquartered in San Jose,
Calif. with subsidiary offices across the globe. For more
information, please visit http://www.novellus.com/ Novellus and
SOLA are registered trademarks, and SOLA xT is a trademark of
Novellus Systems, Inc.
http://www.newscom.com/cgi-bin/prnh/20091020/SF95832LOGO
http://photoarchive.ap.org/ DATASOURCE: Novellus Systems, Inc.
CONTACT: Bob Climo of Novellus Systems, Inc., + 1-408-943-9700, ;
or Marla Kertzman of The Hoffman Agency, + 1-408-975-3032, , for
Novellus Systems, Inc. Web Site: http://www.novellus.com/
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