Versum Materials Introduces Smart, Fab-wide Heat Sourcing and Control for Electronic Specialty Gases in Semiconductor Fabs
23 Maggio 2018 - 12:00PM
Business Wire
The GASGUARD® eV temperature control system now features
remote-mount options, assuring continuous gas flow for safety and
reliability.
Versum Materials, Inc. (NYSE: VSM), a leading materials supplier
to the semiconductor industry, announced today that has
significantly upgraded its GASGUARD eV temperature control system
by adding a remote-mount controller option. The system delivers
smart, state-of-the-art heat sourcing and control of specialty
gases that require heating before delivery to the tool in
semiconductor manufacturing fabs.
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Versum Materials GASGUARD® eV Temperature
Control System (Photo: Business Wire)
“First introduced in 2016, the GASGUARD eV temperature control
system has proven to reduce the cost of heating, increase
performance and enhance the user experience in delivering safe and
reliable temperature control,” said Kerry M. Lanza, product manager
for the Versum Materials GASGUARD Delivery Systems and Services
Group (DS&S).
The newly enhanced system lowers cost of ownership, improves
uptime and simplifies troubleshooting with top and remote mount
options and a smaller footprint. The fully certified,
code-compliant eV model includes an electrochemical compression
heater/controller and a gas cabinet with two 700-watt blankets and
two heat traces to accommodate two A or B size cylinders. It also
includes a GASGUARD AP11 controller, which provides integrated
monitoring and control and offers a single power feed with optional
dual power.
“Our customers reported that eV temperature control technology
provides steady and precise temperature and pressure control,
enhanced Proportional, Integral, Derivative (PID) temperature
control, overheating protection and continuous monitoring. Equally
important, our system ensures an uninterrupted flow of gas with no
temperature peaks and valleys,” said Lanza, adding that the eV
system has proven its value as an element in the “smart
manufacturing” methods adopted in today’s fabs.
According to Lanza, about one-third of the gas delivery systems
sold by Versum Materials use heating to flow low-temperature gases
and the Company strives to improve the systems flexibility by
taking temperature control technology anywhere on the floor where
it is needed.
More than 60 years of experience backs GASGUARD gas and
chemicals delivery systems for the semiconductor,
thin-film-transistor (TFT) LCD and photovoltaics industry. These
delivery systems include automatic, semiautomatic and manual
versions in a variety of configurations—from a single source to a
multiple cylinder source and purge system and can accommodate the
full range of hazardous gases: flammable, pyrophoric, corrosive,
toxic and highly-toxic, all tailored to meet specific manufacturing
needs.
Built on a legacy of more than 30 years of manufacturing and
supplying some 30,000 advanced materials and delivery systems,
Versum Materials continues to design and build safer, more reliable
delivery equipment for high-purity gas and liquid distribution.
For more information on eV temperature control and other
technology, please visit
https://www.versummaterials.com/products/product-directory/featured-products/.
About Versum Materials
Versum Materials, Inc. (NYSE: VSM) is a leading electronic
materials company providing high-purity chemicals and gases,
delivery systems, services and materials expertise to meet the
evolving needs of the global semiconductor and display industries.
Derived from the Latin word for “toward,” the name “Versum”
communicates the company’s deep commitment to helping customers
move toward the future by collaborating, innovating and creating
cutting-edge solutions.
A global leader in technology, quality, safety and
reliability, Versum Materials is one of the world’s
leading suppliers of next-generation CMP slurries, ultra-thin
dielectric and metal film precursors, formulated cleans and etching
products, and delivery equipment that has revolutionized the
semiconductor industry. Versum Materials has annual sales of
approximately US $1.1 billion, 2,200 employees and 12 major
facilities in Asia and North America. It is
headquartered in Tempe, Arizona. Prior to its separation
on Oct. 1, 2016, Versum Materials had operated for
more than three decades as a division of Air Products and
Chemicals, Inc. (NYSE: APD).
For additional information, please visit
http://www.versummaterials.com.
GASGUARD, the Versum Materials logo and Versum are trademarks of
Versum Materials, Inc. or its affiliates.
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version on businesswire.com: https://www.businesswire.com/news/home/20180523005122/en/
Versum Materials, Inc.Investor Inquiries:Soohwan
KimVSMIR@versummaterials.comorMedia Inquiries:Tiffany
ZinnTiffany.Zinn@versummaterials.com
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