Dow Corning Electronics Supports Growing Market Demand By Expanding Polymer Production For Silicon-Infused Bilayer Photoresist
19 Febbraio 2008 - 3:57PM
PR Newswire (US)
Innovative Photoresist Will Now Be Available To More Semiconductor
Device Manufacturers MIDLAND, Mich., Feb. 19 /PRNewswire-FirstCall/
-- In response to growing market demand, Dow Corning Electronics
today announced that it is more than doubling its production
capacity for the silicon polymer resin used to produce an
innovative new bilayer photoresist for semiconductor manufacturing.
In December 2006, Dow Corning and TOK announced that they had
jointly developed a bilayer photoresist using a proprietary Dow
Corning silicon polymer resin in the imaging layer, which provides
improved etch selectivity for chip makers' 193 nm lithography
processes. Then in December 2007, the companies announced that the
bilayer photoresist is now being used in production by a leading
memory chip manufacturer. "With Dow Corning's capacity expansion,
bilayer photoresist will become available to a broader group of
semiconductor device manufacturers," said Jeff Bremmer, global
market manager with Dow Corning Silicon Lithography Solutions. "By
increasing our resin production capacity, we intend to accelerate
the adoption of silicon-based lithography materials." Photoresist
is a light-sensitive material that becomes either soluble or
insoluble after exposure to light, allowing portions to be
selectively removed during subsequent etching processes. Dow
Corning's silicon resin, when combined with photosensitive
materials, allows chip makers to use thinner photoresist layers.
That, in turn, improves pattern resolution, which allows
manufacturers to produce smaller circuit patterns. Dow Corning has
been working with lithography material suppliers to develop
silicon-based resins for 193 nm photoresists and antireflective
coatings since entering the market in 2004. To learn more about
customized silicon resins for advanced lithography applications and
how they can enable enhanced resolution and improved cost
efficiencies, see Dow Corning at the 2008 SPIE Advanced Lithography
exhibition on February 26 or 27 in booth #112. More information is
also found on Dow Corning's web site at
http://www.dowcorning.com/lithography. About Dow Corning Dow
Corning Corporation (http://www.dowcorning.com/) is a globally
integrated provider of materials, application technology and
services, and is focused on providing innovative technologies that
help its customers to invent the future. Dow Corning Corporation is
equally owned by The Dow Chemical Company (NYSE:DOW) and Corning
Incorporated (NYSE:GLW). More than half of Dow Corning
Corporation's sales are outside the United States. DATASOURCE: Dow
Corning Electronics CONTACT: Rhonda Bovin of Dow Corning,
+1-989-496-5489, ; or Bruce Hokanson of Loomis Group for Dow
Corning, +1-360-574-4000, Web site: http://www.dowcorning.com/
http://www.dowcorning.com/lithography
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