Mykrolis Introduces XacTorr(R) CMC Series Vacuum Gauges
11 Luglio 2005 - 4:00PM
PR Newswire (US)
Mykrolis Introduces XacTorr(R) CMC Series Vacuum Gauges XacTorr CMC
Delivers High Performance Vacuum Measurement in a Compact Design
Less Than Half the Size of Traditional Gauges BILLERICA, Mass.,
July 11 /PRNewswire-FirstCall/ -- Mykrolis Corporation (NYSE:MYK),
a leading supplier of components and subsystems to the
semiconductor industry, today announced the release of the XacTorr
CMC series of compact capacitance diaphragm gauges (CDGs) for
vacuum processes that provide accurate total pressure measurement
independent of gas composition. The XacTorr CMC series incorporates
a unique combination of technologies that include a thermally
balanced mechanical structure, physical strain isolation and sensor
shielding for optimal short-term repeatability and long- term
stability. In addition, the XacTorr CMC offers accuracy to 0.25% of
reading for more demanding applications. According to Shaun Pewsey,
senior product manager at Mykrolis Corp., "The XacTorr CMC Series
is a high performance, cost effective solution for unheated gauge
applications. Its compact layout, unique design and high accuracy
make the XacTorr CMC an ideal alternative to larger, premium
unheated gauges and facilitates easy installation and retrofit
replacement." The XacTorr CMC Series is available in full-scale
ranges from 10 Torr to 1000 Torr and is a perfect upgrade for
smaller form-factor CDGs and an economical alternative to full
sized unheated CDGs. About Mykrolis Mykrolis is a worldwide
developer, manufacturer and supplier of liquid and gas delivery
systems, components and consumables used to precisely measure,
deliver, control and purify the process liquids, gases and
chemicals, as well as the deionized water, photoresists and vacuum
systems utilized in the semiconductor manufacturing process. In
addition, the Company's products are used to manufacture a range of
other products, such as flat panel displays, high purity chemicals,
photoresists, solar cells, gas lasers, optical disks and fiber
optic cables. Based in Billerica, Massachusetts, Mykrolis is
formerly Millipore Microelectronics, Inc. For more information,
visit http://www.mykrolis.com/. Mykrolis and XacTorr are registered
trademarks of Mykrolis Corporation. PRESS CONTACT: Craig Lazinsky
Mykrolis Corporation Tel. 978-436-6500 DATASOURCE: Mykrolis
Corporation CONTACT: Craig Lazinsky of Mykrolis Corporation,
+1-978-436-6500, Web site: http://www.mykrolis.com/
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