New GASGUARD eV Temperature Control System from Versum Materials provides tighter, more precise control for heating electroni...
11 Novembre 2016 - 10:25PM
Business Wire
Stand-alone, integrated system can improve
reliability over designs that require third-party equipment
Versum MaterialsTM, Inc. (NYSE:VSM) has introduced its new
GASGUARD® eV Temperature Control System, which is designed to
enhance fabrication consistency and lower the cost of ownership and
operation by delivering reliable fabwide heat sourcing and control
of electronic specialty gases that require heating to maintain or
increase flow. It is engineered for delivery of gases such as NH3,
CO2, SiH2Cl2, WF6, SiCl4, BCl3, HF, C4F6, HBr, CH3F or any
liquefied compressed gas used during semiconductor fabrication and
the manufacturing of TFT-LCDs and photovoltaics.
The GASGUARD eV Temperature Control System integrates the
GASGUARD system’s trusted gas delivery technology with an ECC
heater/controller, two blankets and two heat traces to deliver an
integrated platform that can eliminate the concerns and time of
specifying, installing and commissioning third-party equipment. The
integrated system also allows fabs to scale their manufacturing
with the assurance that the components of the delivery system will
not need to be upgraded or replaced.
The GASGUARD eV system’s newly redesigned heater blanket has
single-piece construction for both the heater and insulation, dual
voltage (120V or 208-240V supply) and over-temperature protection
reliability via redundant bimetallic switches for more precise
delivery of heated gases to the fabrication tools.
Versum has expanded the integrated monitoring and control links
between the heater/controller and AP11 controller to encompass
benchmark gas delivery control that provides users with enhanced
uptime, simplified troubleshooting and increased controller
reliability.
The unit also has a single power feed (with an optional dual
power source) and integrated GFRI protection to lower installation
costs. Even with the additional functionality, the GASGUARD eV
system features a reduced footprint that results in more usable
floor space in the fab.
Available as either a single or multiple source system, the
GASGUARD eV system has Class 1, Division 2, ATEX, CE, CSA approval
as well as other certifications.
This is the newest member of the GASGUARD system line of gas
delivery systems that includes automatic, semi-automatic and manual
systems in a variety of configurations from a single-source system
to a multiple-cylinder source and purge system. The different
GASGUARD system models can accommodate a full range of hazardous
gases: flammable, pyrophoric, corrosives, toxics and highly-toxics,
all tailored to meet specific manufacturing needs.
About Versum Materials, Inc.
Versum Materials (NYSE: VSM) (versummaterials.com) is a
best-in-class electronic materials company providing high-purity
chemicals and gases, delivery systems, services and materials
expertise to meet the evolving needs of the global semiconductor,
display and LED markets. Derived from the Latin word for “toward,”
the name “Versum” (pronounced ver-SOOM) communicates the company’s
deep commitment to helping customers move toward the future by
collaborating, innovating and creating cutting-edge solutions.
A global leader in technology, quality, safety and reliability,
Versum is one of the world’s largest suppliers of next generation
CMP slurries, ultra-thin dielectric and metal film precursors,
formulated cleans and etching products, and delivery equipment that
has revolutionized the semiconductor industry. Versum Materials
operated for more than three decades as a division of Air Products.
An independent company since October 2016, Versum has annual sales
of about US$1 billion, 1,900 employees and 10 major facilities in
Asia and the North America. It is headquartered in Tempe, Ariz.
Note: This press release contains “forward-looking statements”
within the meaning of the safe harbor provisions of the U.S.
Private Securities Litigation Reform Act of 1995. Forward-looking
statements can be identified by references to future periods, and
include statements we make about our ability to meet the
anticipated needs of our customers and the industries we serve, and
the expected performance and scalability of our products in
specific customer environments with differing manufacturing needs,
the ability to align our resources to meet the demands of the
industries we serve, our future sales, the success of our planned
strategy of moving our capabilities closer to our customers, and
our prospects following the spin-off. These forward-looking
statements are based on management’s reasonable expectations and
assumptions as of the date of this release. Actual results and the
outcomes of future events may differ materially from the those
expressed or implied in the forward-looking statements because of a
number of risks and uncertainties, including, without limitation,
the general economic and business conditions that could decrease
the demand for our goods and services; our concentrated customer
base; our ability to continue technological innovation to meet the
evolving needs of our customers; our substantial post-spin
leverage; and other risk factors described in our filings with the
Securities and Exchange Commission, including the amended
Registration Statement on Form 10, and our Current Reports on Form
8-K filed since. Versum assumes no obligation to update any
forward-looking statements or information in this release.
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Versum Materials, Inc.Media
Inquiries:Michael Drabenstott,
610-417-0503Mike.Drabenstott@versummaterials.comorInvestor Inquiries:Nahla Azmy,
610-481-7461Nahla.Azmy@versummaterials.com
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