Aviza Technology Introduces StratIon™ fxP, The World’s First 300-mm Ready Ion Beam Deposition System
06 Novembre 2008 - 12:30PM
Business Wire
Aviza Technology, Inc. (NASDAQ:AVZA), a supplier of advanced
semiconductor capital equipment and process technologies for the
global semiconductor industry and related markets, today announced
the introduction of StratIon� fxP, the world�s first 300-mm ready
Ion Beam Deposition system. The first system was shipped to
CEA-LETI-MINATEC in Grenoble, France, one of Europe�s foremost
applied research centers in electronics and Spintronics. The
StratIon fxP will be used to develop next-generation magnetic
tunnel junction (MTJ)-based devices for applications including
Magnetic Random Access Memory (MRAM), hard disk drive read heads or
RF components. The system will also be used for the deposition of
metal gates for advanced CMOS processes. In addition to the system
shipment, Aviza and CEA-LETI have signed a three year joint
development program covering the development of MTJ deposition
processes for future MRAM and Spintronics devices. The StratIon fxP
system uses ion beam processing for the deposition of metal and
dielectric thin films, and is the world�s first ion beam deposition
system for 300mm wafer manufacturing. Designed for high volume
manufacturing silicon fabs, the system is based on
production-proven hardware and software platforms and can be
configured with three standard chamber types: preclean, oxidation
and deposition. Additional Aviza deposition chambers such as atomic
layer deposition (ALD) and magnetron PVD can be seamlessly added
for additional flexibility. StratIon fxP offers low cost of
ownership, high throughput and a smaller fab footprint compared to
currently available systems used for MTJ deposition. �Aviza�s
StratIon fxP system is an integral component of our Spintronics
development process,� said Dr. Laurent Malier, Chief Executive
Officer of Leti. �By collaborating on Spintronics technology with
equipment suppliers like Aviza, we believe we can deliver
cost-effective and production-worthy solutions for future
Spintronics devices as they make the transition to high volume
manufacturing.� Aviza�s ion beam deposition delivers key advantages
over traditional magnetron sputtering approaches. Use of Aviza�s
patented M0RI plasma source enables ultra-low pressure deposition
producing films, which are twice as smooth as those produced by
currently available MTJ sputter deposition tools. Smoothness is a
critical parameter in MTJ stacks, where the thinnest films are less
than 10 angstroms. The StratIon fxP produces films with less than 2
angstroms rms roughness and less than 0.5 percent thickness
non-uniformity on 300mm wafers. �We are pleased to be in
partnership with such a distinguished research center, as Leti,�
said Jerry Cutini, President and Chief Executive Officer of Aviza
Technology, Inc. �We believe that combining both companies�
technology expertise under this collaboration will help accelerate
the adoption of MRAM and Spintronics technologies. Both Aviza and
Leti will be well positioned to support IC makers in the MRAM and
Spintronics arenas, as their focus shifts from research and
development to volume production.� Spintronics Technology for
Broadband Applications Device scaling poses critical challenges for
flash memory manufacturers, such as excessive electrical leakage at
the 65nm technology node and below. Flash memory may fail to scale
beyond 32nm technology and memory makers continue to look for
alternative architectures. MRAM offers a combination of
non-volatility, near unlimited endurance, small cell size and fast
read/write times, making it well placed to succeed flash memory in
both discrete and embedded implementations. It also has the
potential to eventually displace SRAM in cache memory or to be an
alternative to NV-SRAM. Longer term high speed Spin Transfer Torque
MRAM may challenge DRAM as primary memory in computers, and become
the universal memory architecture. Other MTJ-based devices are
foreseen for high speed reconfigurable logic or tuneable RF
components for opportunistic radio systems. Spintronics devices can
be thus incorporated in a broad range of applications, including:
mobile phones, mobile computing, PDAs, audio/video, sensors, smart
cards, RFID, digital imaging, aerospace/military, networking and
factory automation. Spintronics Definition Spintronics or
magneto-electronics is an emerging technology which exploits the
intrinsic spin of electrons in solid-state devices. Spintronics
devices manipulate electron spin rather than electron charge, and
work on the basis that electrons can be spin-polarized into one of
two states. Examples of Spintronics-based devices include MRAM and
hard disk drive read heads. Potential future applications include
spin-based transistors. Safe Harbor This press release contains
forward-looking statements. These forward-looking statements are
based on our management's current expectations and beliefs and
involve numerous risks and uncertainties that could cause actual
results to differ materially from expectations. You should not rely
upon these forward-looking statements as predictions of future
events because we cannot assure you that the events or
circumstances reflected in these statements will be achieved or
will occur. These forward-looking statements include, but are not
limited to, the statements made by Jerry Cutini and all statements
containing the words "believes," "expects," "may," "will,"
"should," "seeks," "intends," "plans," "estimates" or "anticipates"
or the negative of these words and phrases or other variations of
these words and phrases or comparable terminology. Many factors
could cause our actual results to differ materially from those
projected in these forward-looking statements. Some of these
factors and other important factors are detailed in our various
Securities and Exchange Commission filings, particularly in our
most recent Annual Report on Form 10-K and Quarterly Report on Form
10-Q, copies of which are available from us without charge. Please
review these filings and do not place undue reliance on these
forward-looking statements. We assume no obligation to update
forward-looking statements. About Aviza Technology, Inc. Aviza
Technology, Inc. designs, manufactures, sells and supports advanced
semiconductor capital equipment and process technologies for the
global semiconductor industry and related markets. The company�s
systems are used in a variety of segments of the semiconductor
market, such as advanced silicon for memory devices, advanced 3-D
packaging and power integrated circuits for communications. Aviza�s
common stock is publicly traded on the NASDAQ Global Market (NASDAQ
GM: AVZA). Aviza is headquartered in Scotts Valley, Calif., with
manufacturing, R&D, sales and customer support facilities
located in the United Kingdom, Germany, France, Taiwan, China,
Japan, Korea, Singapore and Malaysia. Additional information about
the company can be found at http://www.aviza.com. About CEA-LETI:
Leti, a CEA�laboratory located in Grenoble, is one of the main
European applied research centers in electronics. More than 85% of
its activity is devoted to research with 350 contracts a year.
Since its creation in 1967, Leti has led to the creation of more
than 30 start-ups in high-technology. The main areas of activity
are micro- and nano-technologies for microelectronics (more Moore,
More than Moore and Beyond CMOS), technologies, design and
integration of microsystems, photonics and imaging technologies,
micro- and nano-technologies for biology and health, communication
technologies and nomadic objects. Leti operates with an annual
budget of 174 M� and employs 1,000 people with, in addition, more
than 600 external collaborators (postgraduates, research and
corporate partners). Leti has 8,000m� of clean rooms, an equipment
portfolio worth 200 M� and invests more than 40 M� a year on new
equipment. Leti has a dynamic Intellectual Property policy and has
filed more than 200 new patent applications in 2007. Leti is one of
the main forces behind Minatec�, Europe�s premier Centre of
Excellence in Micro- and Nano-technologies. Today, Minatec�
sustains more than 4,000 researchers, industrial partners and
teaching staff in Grenoble. For more information: www-leti.cea.fr
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