Onto Innovation Further Strengthens Company’s Panel Portfolio with New Glass Suite
09 Luglio 2024 - 1:30PM
Business Wire
Onto’s JetStep® lithography and Firefly® G3
inspection systems offer a powerful solution as the industry
pursues glass core panel transition
Onto Innovation Inc. (NYSE: ONTO) today announced Onto
Innovation’s glass substrate suite featuring the JetStep® X500
panel-level packaging lithography system with hybrid substrate
handling capabilities and the Firefly® G3 sub-micron automatic
metrology and inspection system for panel-level packaging and
advanced IC substrates (AICS). The JetStep X500 and Firefly G3
systems offer customers a complete panel-level packaging solution
supporting heterogeneous integration (HI) chiplet packages for AI,
high performance compute and cloud computing. The AICS market is
expected to increase at a compound annual growth rate of 10% from
2023 to 2028, according to Prismark.
The AICS HI roadmap is rapidly approaching several new
demarcation points, including the challenges for organic substrate
redistribution layers (RDLs) using copper clad laminate (CCL) below
3µm. These challenges are prompting manufacturers to adopt more
stable substrates such as glass. The necessity for manufacturers to
handle both large glass core panels as well as the existing mature
CCL based organic substrates opens new market opportunities for
lithography tools capable of handling both substrate types.
“The hybrid substrate handling capabilities of the JetStep X500
system demonstrate Onto Innovation’s commitment to continually
improving our portfolio of panel-level products to meet cutting
edge technological advances,” says Jason Robinson, vice president
and general manager of Onto’s lithography business. “With the
capability for sub-1.5µm l/s RDL resolution and the ability to
expose panel areas of up to 250mm x 250mm in one shot, the JetStep
series delivers an advanced packaging solution that meets the needs
of today’s organic substrates and the glass substrates powering the
next evolution in highly advanced HI packages.”
In addition to evolving lithographic requirements, the
production of glass substrates generates several significant
process control challenges attributed to cracks and chips and as a
result of handling, through glass via (TGV) formation and the Cu
plating process. Customers require 3D metrology solutions focused
on TGVs, such as the need to measure via-to-via distance and via
diameter for top, waist and bottom.
Using a combination of different illumination techniques,
including Onto’s patented Clearfield® technology, the Firefly G3
system has emerged as a successful inspection tool for organic
panels. By applying these same techniques to glass panels, Onto
expands upon the Firefly G3 system’s previous success by delivering
a uniquely designed inspection solution for bare and patterned
glass substrates. Capable of identifying cracks and chips, the
Firefly G3 system also can perform TGV metrology for vias,
including finding the X and Y displacements of TGVs from their
nominal positions in a matter of minutes. The system also can
inspect for defects like dimples, which are formed during etching.
Using the Firefly G3 system and its unique 3D metrology sensors for
dielectric thickness measurements, customers are enabled to achieve
proper copper plating height uniformity for RDLs.
“The Firefly G3 system is capable of supporting a range of
panels and substrate types with sensitivity below 1µm, making it an
extremely versatile investment for our customers,” says Mayson
Brooks, vice president and general manager of Onto’s inspection
business. “That versatility has led to a broad range of customers
selecting the Firefly G3 system, along with the JetStep X500, for
their next expansions, further positioning Onto Innovation for
continued growth in the advanced packaging panel-level packaging
market.”
To learn more about Onto’s glass panel suite, visit our booth
#633 at SEMICON® West, contact us or reach out to your local sales
team.
About Onto Innovation Inc.
Onto Innovation is a leader in process control, combining global
scale with an expanded portfolio of leading-edge technologies that
include: Un-patterned wafer quality; 3D metrology spanning chip
features from nanometer scale transistors to large die
interconnects; macro defect inspection of wafers and packages;
metal interconnect composition; factory analytics; and lithography
for advanced semiconductor packaging. Our breadth of offerings
across the entire semiconductor value chain combined with our
connected thinking approach results in a unique perspective to help
solve our customers’ most difficult yield, device performance,
quality, and reliability issues. Onto Innovation strives to
optimize customers’ critical path of progress by making them
smarter, faster and more efficient. With headquarters and
manufacturing in the U.S., Onto Innovation supports customers with
a worldwide sales and service organization. Additional information
can be found at www.ontoinnovation.com.
Forward Looking Statements
This press release contains forward-looking statements within
the meaning of the Private Securities Litigation Reform Act of 1995
(the “Act”) which include statements relating to Onto Innovation’s
business momentum and future growth; the benefit to customers and
the capabilities of Onto Innovation’s products and customer
service; Onto Innovation’s ability to both deliver products and
services consistent with our customers’ demands and expectations
and strengthen its market position, Onto Innovation’s beliefs about
market opportunities as well as other matters that are not purely
historical data. Onto Innovation wishes to take advantage of the
“safe harbor” provided for by the Act and cautions that actual
results may differ materially from those projected as a result of
various factors, including risks and uncertainties, many of which
are beyond Onto Innovation’s control. Such factors include, but are
not limited to, the Company’s ability to leverage its resources to
improve its position in its core markets; its ability to weather
difficult economic environments; its ability to open new market
opportunities and target high-margin markets; the strength/weakness
of the back-end and/or front-end semiconductor market segments;
fluctuations in customer capital spending; the Company’s ability to
effectively manage its supply chain and adequately source
components from suppliers to meet customer demand; the effects of
political, economic, legal, and regulatory changes or conflicts on
the Company's global operations; its ability to adequately protect
its intellectual property rights and maintain data security; the
effects of natural disasters or public health emergencies, such as
the COVID-19 pandemic, on the global economy and on the Company’s
customers, suppliers, employees, and business; its ability to
effectively maneuver global trade issues and changes in trade and
export license policies; the Company’s ability to maintain
relationships with its customers and manage appropriate levels of
inventory to meet customer demands; and the Company’s ability to
successfully integrate acquired businesses and technologies.
Additional information and considerations regarding the risks faced
by Onto Innovation are available in Onto Innovation’s Form 10-K
report for the year ended December 30, 2023 and other filings with
the Securities and Exchange Commission. As the forward-looking
statements are based on Onto Innovation’s current expectations, the
Company cannot guarantee any related future results, levels of
activity, performance or achievements. Onto Innovation does not
assume any obligation to update the forward-looking information
contained in this press release, whether as a result of new
information, future events or otherwise, except as required by
law.
Source: Onto Innovation Inc. ONTO-IP
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version on businesswire.com: https://www.businesswire.com/news/home/20240709852324/en/
Investor Relations: Sidney Ho, +1 408.376.9163
Sidney.ho@ontoinnovation.com
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